1. Micro & Nano Lithography
a. Nanoimprint Lithography: Systems, alignment, nano-imprint methods, results and applications, stamp fabrication…
b. Mask-Less Lithography: Photon, charged particle, proximity probe techniques, sources, optics, systems, alignment, modeling, throughput…
c. Photon Lithography: DUV, immersion, EUV, sources, optics, systems, mask technology, alignment, optical proximity correction, lithography modeling, novel techniques…
d. Electron and Ion Beam Lithography: Sources, optics, systems, alignment, e-beam proximity correction, e-beam mask writer, ion beam surface interactions…
e. Materials for Micro and Nano Lithography: Resists, molecular resists, thin films, multilayer and inorganic resists, antireflective coatings, surface imaging, conductive films, chemical amplification, wet and dry processing, characterisation, modeling…
2. Micro & Nano Fabrication, Nano Engineering
a. Nanofabrication with top-down and bottom-up approaches: Novel fabrication methods, self-assembly, directed self-assembly, bottom-up & top-down combination, surface nano engineering, miniaturisation limits, scanning probe techniques, nanoscale modeling…
b. Pattern Transfer and Plasma etching: Nanoscale etching, litho-etch interactions, etching for M(N)EMS and bioMEMS, etch damage, lift-off, plating, sputtering, beam etching / deposition, modeling…
c. Nanometrology: Inspection, testing, metrology and in-situ process measurements, devices and circuits, nanoscale metrology…
d. Nanoelectronic / photonic devices: Nanoelectronics, nanooptics / nanophonotics, nanomechanical devices, nanomagnetics, data storage, carbon nanotube devices, molecular devices, characterisation…
e. Micro and Nanomanufacturing: Transfer of Nanofabrication and Nanoscience from lab to industry. Manufacturable production of nanostructures, devices, and systems…
3. Micro & Nano Fabrication for Life Sciences
a. Micro & Nano fluidics, devices for biology, chemistry, medicine: Micro-nano fluidics fabrication and characterisation, micro-biodevices, nanomedicine targeted devices, microarrays, micro-nano devices for chemical analysis, nanobiotechnology applications…
b. Micro & Nano Systems for biology, chemistry, medicine: BioMEMS, Lab-on-a-chip, µTAS, nanobiotechnology integrated systems…
4. Micro & Nano systems and their fabrication, MEMS, NEMS
Surface and bulk mirco machining, 3D structures, stereolithography, new materials, sensors and actuators, M(O)EMS, RF-MEMS/NEMS, electromechanical passive devices, RF mechanical resonators…